MM Solutions Logo

IntelliSense Software

A new point of view

Until now, CAD tools for MEMS have focused on geometric representation from the process in order to analyze device behavior. The drawback of this simulation method is that process induced effects may vary the geometry of the structure significantly. For example, the boron diffusion as an etch stop layer for bulk silicon processing may overstress the structure, or a silicon glass bonding process may breakdown the oxide film.

The comprehensive process simulation modules incorporate deposition, etching, bonding, doping, electroplating, liftoff, and other process steps common in MEMS design. Other process induced effects, such as micro-assembly, are also addressed to generate accurate geometric models for the complete range of MEMS devices. These key processes are simulated physically so that such side effects are accounted for in the design.

The power of teams

IntelliSuite is designed around collaboration, allowing the design team and the process team to work together to create MEMS devices that can be prototyped and manufactured without costly iterations. IntelliSuite starts the design process not from device geometry but from fabrication machine settings. This approach leads to the creation of highly accurate models, which demonstrate that device geometry and behavior are a result of process conditions. IntelliSuite optimizes MEMS designs prior to fabrication, reducing prototype development cycle time and cutting manufacturing costs.

Design the next small thing …

IntelliSuite comes with all the design tools required to take your product from concept to market.

They ship a full complement of tools that will allow you to perform process modeling, device layout and device analysis. Fully featured and completely coupled electrical, piezoelectrical, mechanical, and thermal analysis tools come standard, allowing you to perform static or transient analysis. In addition, optional modules for Electromagnetic and Fluidic analysis are available for your disposal. We are constantly monitoring the latest developments in the MEMS scene for additional features.

Of course, they can also custom develop features for to meet your specific needs.

Visit the IntelliSense Homepage